[SUPER170] FLIP CHIP BONDER

General Specification

Index Time0.7 sec/chip(Including 0.1sec Process Time)
UPH5,100 ea/hour
Lead FrameHorizontal Lead Frame Or Substrate
Bonding MethodSupersonic & Thermal Pressure Bonding
Chip Size0.1 ~ 2.0 mm
Bonding AccuracyXY : ±5um
Bonding Force1N ~ 30N Digital Control

 

Material Size

SubstrateWidth : 50~100mm
MagazineCustomer Specification
Wafer4 Inch

 

Utility

PowerAC220V 50/60Hz 1Φ
Dimension900(W) 1000(L) 1930(H)
Weight1,400Kg

 

Unit Specification

LoaderSubstrate 3ea Supply
FeederLoading Using Linear Motor
UnloaderMagazine Vertical Drive
Wafer Stage4 Inch Wafer Expansion
Chip Recognition9ea Chip Mode
Pick up & Flip HeadChip Pick Up Check By Vacuum
Nozzle Level Auto Detection
HeadBonding Force Controlled by Voice coil
One Touch Collect Switch Type
Chip Pick Up Check By Vacuum
Bonding TableSubstrate Absorption By Vacuum
Load Cell / Heater
EjectSheet Absorption By Vacuum
Vision4ch Vision System
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